Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 11 Vol. 32; Iss. 6
![](/img/cover-not-exists.png)
Evanescent-coupled antireflection coatings for hyper-numerical aperture immersion lithography
Bourke, Levi, Blaikie, Richard J.Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4900726
Date:
November, 2014
File:
PDF, 1.31 MB
english, 2014