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In Situ Spectrum Observation of Ga Deposition Process during GaAs Metal-Organic Chemical Vapor Deposition Using Surface Photo-Absorption
Yamauchi, Yoshiharu, Uwai, Kunihiko, Kobayashi, NaokiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1380
Date:
October, 1993
File:
PDF, 615 KB
1993