In Situ Spectrum Observation of Ga Deposition...

Japanese Journal of Applied Physics 1993 / 10 Vol. 32; Iss. Part 2, No

In Situ Spectrum Observation of Ga Deposition Process during GaAs Metal-Organic Chemical Vapor Deposition Using Surface Photo-Absorption

Yamauchi, Yoshiharu, Uwai, Kunihiko, Kobayashi, Naoki
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1380
Date:
October, 1993
File:
PDF, 615 KB
1993
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