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Carbon Atomic Layer Doping in AlGaAs by Metalorganic Chemical Vapor Deposition and Its Application to a P-Type Modulation Doped Structure
Makimoto, Toshiki, Kobayashi, NaokiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.L1300
Date:
September, 1993
File:
PDF, 793 KB
1993