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In Situ X-Ray Monitoring of Metalorganic Vapor Phase Epitaxy
Tsuchiya, Tomonobu, Taniwatari, Tsuyoshi, Uomi, Kazuhisa, Kawano, Toshihiro, Ono, YuuichiVolume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.4652
Date:
October, 1993
File:
PDF, 559 KB
1993