In Situ Measurement of Gas-Phase Reactions in...

In Situ Measurement of Gas-Phase Reactions in Metal-Organic Chemical Vapor Deposition of Copper Films by Fourier Transform Infrared Spectroscopy

Hanaoka, Ken-ichi, Ohnishi, Hiroshi, Tachibana, Kunihide
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.4774
Date:
October, 1993
File:
PDF, 825 KB
1993
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