Accurate Measurement of Layer Thickness Using Optical...

Japanese Journal of Applied Physics 1993 / 10 Vol. 32; Iss. Part 1, No

Accurate Measurement of Layer Thickness Using Optical Reflective Spectra of Bragg Mirrors Grown by Molecular Beam Epitaxy

Toyoda, Takashi, Mitsunaga, Kazumasa, Ohta, Jun, Kyuma, Kazuo
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.4436
Date:
October, 1993
File:
PDF, 747 KB
1993
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