EL2 Out-Diffusion in Thermally Annealed Liquid-Encapsulated...

Japanese Journal of Applied Physics 1993 / 11 Vol. 32; Iss. Part 1, No

EL2 Out-Diffusion in Thermally Annealed Liquid-Encapsulated Czochralski GaAs

Ogata, Junzo, Iwai, Akiyoshi, Chichibu, Shigefusa, Matsumoto, Satoru
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.32.5059
Date:
November, 1993
File:
PDF, 513 KB
1993
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