Anisotropic Ridge Growth by Step-Flow-Mode Metalorganic...

Anisotropic Ridge Growth by Step-Flow-Mode Metalorganic Chemical Vapor Deposition Using Diethylgalliumchloride

Yamaguchi, Ko-ichi, Okamoto, Kotaro
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Volume:
32
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.32.4885
Date:
November, 1993
File:
PDF, 1.04 MB
1993
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