Influence of Substrate Misorientation on Carbon...

Japanese Journal of Applied Physics 1994 / 3 Vol. 33; Iss. Part 2, No

Influence of Substrate Misorientation on Carbon Incorporation in GaAs by Metal Organic Chemical Vapor Deposition

Ito, Hiroshi, Watanabe, Noriyuki, Nittono, Takumi, Ishibashi, Tadao
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L399
Date:
March, 1994
File:
PDF, 511 KB
1994
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