Low-Temperature Metalorganic Chemical Vapor Deposition...

Japanese Journal of Applied Physics 1994 / 3 Vol. 33; Iss. Part 2, No

Low-Temperature Metalorganic Chemical Vapor Deposition Growth of InGaAs for a Non-Alloyed Ohmic Contact to n-GaAs

Watanabe, Noriyuki, Nittono, Takumi, Ito, Hiroshi
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.33.l271
Date:
March, 1994
File:
PDF, 599 KB
1994
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