[ECS 214th ECS Meeting - Honolulu, HI (October 12 - October 17, 2008)] ECS Transactions - Ellipsometric Porosimetry: Fast and Non Destructive Technique for Characterization of Porous Low-K; Highlights on Plasma Damage and Water Effect on Treated Materials
Bourgeois, Alexis, Bondaz, Alexis, Kitzinger, Laurent, Defranoux, ChristopheVolume:
16
Year:
2008
Language:
english
DOI:
10.1149/1.2982559
File:
PDF, 1.52 MB
english, 2008