UV laser microprocessing and post chemical etching on...

Journal of the European Ceramic Society 2011 Vol. 31; Iss. 9

UV laser microprocessing and post chemical etching on ultrathin Al2O3 ceramic substrate

Fei Zhang, Jun Duan, Xiaoyan Zeng, Yu Cao
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Volume:
31
Year:
2011
Language:
english
Pages:
9
DOI:
10.1016/j.jeurceramsoc.2011.03.034
File:
PDF, 856 KB
english, 2011
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