Liquid Phase Epitaxial Growth of Si Layers on Si Thin Substrates from Si Pure Melts under Near-Equilibrium Conditions
Nakajima, Kazuo, Fujiwara, Kozo, Nose, Yoshitaro, Usami, NoritakaVolume:
44
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.44.5092
Date:
July, 2005
File:
PDF, 232 KB
english, 2005