Fabrication of GaInAs/GaInAsP/InP Multi-Quantum-Wires and...

Japanese Journal of Applied Physics 1994 / 10 Vol. 33; Iss. Part 2, No

Fabrication of GaInAs/GaInAsP/InP Multi-Quantum-Wires and -Boxes by Substrate-Potential-Controlled Electron Cyclotron Resonance Reactive Ion Beam Etching

Kudo, Koji, Nagashima, Yasuaki, Tamura, Munehisa, Tamura, Shigeo, Ubukata, Akinori, Arai, Shigehisa
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L1382
Date:
October, 1994
File:
PDF, 814 KB
1994
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