Sub-100μs nanoimprint lithography at wafer scale

Microelectronic Engineering 2015 / 06 Vol. 141

Sub-100μs nanoimprint lithography at wafer scale

Tormen, Massimo, Sovernigo, Enrico, Pozzato, Alessandro, Pianigiani, Michele, Tormen, Maurizio
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Volume:
141
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.01.002
Date:
June, 2015
File:
PDF, 2.12 MB
english, 2015
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