Atomic Layer Epitaxy of AlAs Using Dimethylethylamine Alane

Japanese Journal of Applied Physics 1994 / 9 Vol. 33; Iss. Part 2, No

Atomic Layer Epitaxy of AlAs Using Dimethylethylamine Alane

Nagano, Masahiro, Iwai, Sohachi, Nemoto, Koshichi, Aoyagi, Yoshinobu
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.33.l1289
Date:
September, 1994
File:
PDF, 389 KB
1994
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