Metalorganic Vapor Phase Epitaxy Growth of Be-Doped InP Using Bismethylcyclopentadienyl-Berylium
Kimura, Tatsuya, Ishida, Takao, Sonoda, Takuji, Mihashi, Yutaka, Takamiya, Saburo, Mitsui, SigeruVolume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.1106
Date:
February, 1995
File:
PDF, 528 KB
1995