Atomic Layer Deposition of AlO[sub x] for Thin Film Head Gap Applications
Paranjpe, Ajit, Gopinath, Sanjay, Omstead, Tom, Bubber, RandhirVolume:
148
Year:
2001
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1385822
File:
PDF, 815 KB
english, 2001