Dimethylamine as a Carbon Remover in Atomic Layer Epitaxy...

Japanese Journal of Applied Physics 1995 / 11 Vol. 34; Iss. Part 2, No

Dimethylamine as a Carbon Remover in Atomic Layer Epitaxy of AlAs

Hirose, Shingo, Kano, Nobuo, Deura, Manabu, Hara, Kazuhiko, Munekata, Hiro
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Volume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.L1436
Date:
November, 1995
File:
PDF, 469 KB
1995
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