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Dimethylamine as a Carbon Remover in Atomic Layer Epitaxy of AlAs
Hirose, Shingo, Kano, Nobuo, Deura, Manabu, Hara, Kazuhiko, Munekata, HiroVolume:
34
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.34.L1436
Date:
November, 1995
File:
PDF, 469 KB
1995