Characterization of HfO[sub 2] and HfO[sub x]N[sub y] Gate Dielectrics Grown by PE Metallorganic CVD with a TaN Gate Electrode
Choi, Kyu-Jeong, Kim, Jeon-Ho, Yoon, Soon-GilVolume:
151
Year:
2004
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1666207
File:
PDF, 120 KB
english, 2004