Aluminium Surface Grain Size Analysis on RIE Treatment
Sauli, Zaliman, Retnasamy, Vithyacharan, Fuad, Fairul Afzal Ahmad, Ehkan, Phaklen, Palianysamy, Moganraj, Yeow, Aaron Koay TerrVolume:
404
Language:
english
Journal:
Applied Mechanics and Materials
DOI:
10.4028/www.scientific.net/AMM.404.67
Date:
September, 2013
File:
PDF, 275 KB
english, 2013