Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin...

Integrated Ferroelectrics 2003 / 01 Vol. 51; Iss. 1

Role of Ultra Thin SiOx Layer on Epitaxial YSZ/SiOx/Si Thin Film

Kiguchi, Takanori, Wakiya, Naoki, Shinozaki, Kazuo, Mizutani, Nobuyasu
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Volume:
51
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580390229815
Date:
January, 2003
File:
PDF, 766 KB
english, 2003
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