Line edge roughness metrology using atomic force...

Measurement Science and Technology 2005 / 11 Vol. 16; Iss. 11

Line edge roughness metrology using atomic force microscopes

Orji, Ndubuisi G, Vorburger, Theodore V, Fu, Joseph, Dixson, Ronald G, Nguyen, Cattien V, Raja, Jayaraman
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Volume:
16
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/16/11/004
Date:
November, 2005
File:
PDF, 1.02 MB
english, 2005
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