Identification of Water Molecules in Low Humidity and...

Japanese Journal of Applied Physics 1996 / 8 Vol. 35; Iss. Part 1, No

Identification of Water Molecules in Low Humidity and Possibility of Quantitative Gas Analysis using Porous Silicon Gas Sensor

Motohashi, Akira, Ruike, Masatoshi, Kawakami, Manabu, Aoyagi, Hidekazu, Kinoshita, Akira, Satou, Akinobu
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Volume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.35.4253
Date:
August, 1996
File:
PDF, 712 KB
1996
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