AlSb THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING AND...

International Journal of Modern Physics B 2008 / 06 Vol. 22; Iss. 14

AlSb THIN FILMS PREPARED BY DC MAGNETRON SPUTTERING AND ANNEALING

CHEN, WEIDONG, FENG, LIANGHUAN, LEI, ZHI, ZHANG, JINGQUAN, YAO, FEFE, CAI, WEI, CAI, YAPING, LI, WEI, WU, LILI, LI, BING, ZHENG, JIA-GUI
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Volume:
22
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979208039447
Date:
June, 2008
File:
PDF, 380 KB
english, 2008
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