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In-Situ Cleaning of S i O 2 -Patterned GaAs Surface with Trisdimethylaminoarsine for Selective Regrowth
Ortion, Jean Michel, Cordier, Yvon, Garcia, Jean Charles, Adam, Didier, Grattepain, ClaudeVolume:
35
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.35.5964
Date:
December, 1996
File:
PDF, 1.10 MB
1996