Auto-doping of Carbon to AlAs Grown by Metalorganic...

Auto-doping of Carbon to AlAs Grown by Metalorganic Chemical Vapor Deposition using Trimethylaluminum and Tertiarybutylarsine

Sekiguchi, Shigeaki, Miyamoto, Tomoyuki, Koyama, Fumio, Iga, Kenichi
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.2638
Date:
May, 1997
File:
PDF, 416 KB
1997
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