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Stress-induced nano-oxidation of silicon by diamond-tip in moisture environment: A hybrid quantum-classical simulation study
S. Ogata, Y. Abe, N. Ohba, R. KobayashiVolume:
108
Year:
2010
Language:
english
DOI:
10.1063/1.3481451
File:
PDF, 2.20 MB
english, 2010