Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
1996 Vol. 14; Iss. 6
Optimal filtering of scanning probe microscope images for wear analysis of smooth surfaces
K. SchouterdenVolume:
14
Year:
1996
Language:
english
DOI:
10.1116/1.588777
File:
PDF, 884 KB
english, 1996