The Analysis of Trace Impurities in Nitrogen Gas by High...

Japanese Journal of Applied Physics 1997 / 11 Vol. 36; Iss. Part 1, No

The Analysis of Trace Impurities in Nitrogen Gas by High Pressure Ionization Mass Spectrometry

Ishihara, Yoshio, Umehara, Hitomi, Nishina, Akira, Kimijima, Tetsuya
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Volume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.36.6999
Date:
November, 1997
File:
PDF, 844 KB
1997
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