Modification of Heat and Mass Transfers and Their Effect on the Crystal-Melt Interface Shape of Si Single Crystal during Czochralski Crystal Growth
Watanabe, Masahito, Kakimoto, Koichi, Eguchi, Minoru, Hibiya, TaketoshiVolume:
36
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.36.6181
Date:
October, 1997
File:
PDF, 966 KB
1997