![](/img/cover-not-exists.png)
STRUCTURAL PROPERTIES OF AlN FILMS WITH OXYGEN CONTENT DEPOSITED BY REACTIVE MAGNETRON SPUTTERING: XRD AND XPS CHARACTERIZATION
GARCÍA-MÉNDEZ, MANUEL, MORALES-RODRÍGUEZ, SANTOS, SHAJI, SADASIVAN, KRISHNAN, BINDU, BARTOLO-PÉREZ, PASCUALVolume:
18
Language:
english
Journal:
Surface Review and Letters
DOI:
10.1142/S0218625X1101445X
Date:
February, 2011
File:
PDF, 220 KB
english, 2011