THE EFFECT OF a-SiN:H AND a-Si:H SURFACE ROUGHNESS OF TFT...

International Journal of Modern Physics B 2010 / 06 Vol. 24; Iss. 15n16

THE EFFECT OF a-SiN:H AND a-Si:H SURFACE ROUGHNESS OF TFT BY PE/RACVD

KIM, JIN-EUI, RYU, SANG-HYUK, CHOI, SIE-YOUNG
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Volume:
24
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979210066161
Date:
June, 2010
File:
PDF, 315 KB
english, 2010
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