Periodic Changes in $\bf SiO_{2}/Si(111)$ Interface...

Japanese Journal of Applied Physics 1994 / 5 Vol. 33; Iss. Part 2, No

Periodic Changes in $\bf SiO_{2}/Si(111)$ Interface Structures with Progress of Thermal Oxidation

Ohishi, Kazuaki, Hattori, Takeo
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Volume:
33
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.33.L675
Date:
May, 1994
File:
PDF, 690 KB
1994
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