Atomic Layer Epitaxy of Silicon

Materials and Manufacturing Processes 1995 / 03 Vol. 10; Iss. 2

Atomic Layer Epitaxy of Silicon

Imai, Shigeru, Takagi, Satoru, Iizuka, Toshio, Sugiura, Osamu, Matsumura, Masakiyo
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Volume:
10
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426919508935020
Date:
March, 1995
File:
PDF, 99 KB
english, 1995
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