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Atomic Layer Epitaxy of Silicon
Imai, Shigeru, Takagi, Satoru, Iizuka, Toshio, Sugiura, Osamu, Matsumura, MasakiyoVolume:
10
Language:
english
Journal:
Materials and Manufacturing Processes
DOI:
10.1080/10426919508935020
Date:
March, 1995
File:
PDF, 99 KB
english, 1995