APPLICATIONS OF NANOIMPRINT LITHOGRAPHY FOR BIOCHEMICAL AND...

International Journal of Nanoscience 2009 / 02 Vol. 8; Iss. 1n2

APPLICATIONS OF NANOIMPRINT LITHOGRAPHY FOR BIOCHEMICAL AND NANOPHOTONIC STRUCTURES USING SU-8

LU, BINGRUI, XIE, SHEN-QI, WAN, JING, YANG, RONG, SHU, ZHEN, QU, XIN-PING, LIU, RAN, CHEN, YIFANG, HUQ, EJAZ
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Volume:
8
Language:
english
Journal:
International Journal of Nanoscience
DOI:
10.1142/S0219581X09005931
Date:
February, 2009
File:
PDF, 1.04 MB
english, 2009
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