Nonlinear control of an electromagnetic polymer MEMS hard-magnetic micromirror and its imaging application
Chen, H, Pallapa, M, Sun, W J, Sun, Z D, Yeow, J T WVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/4/045004
Date:
April, 2014
File:
PDF, 1.15 MB
english, 2014