Post-CMOS compatible high-throughput fabrication of...

Post-CMOS compatible high-throughput fabrication of AlN-based piezoelectric microcantilevers

Pérez-Campos, A, Iriarte, G F, Hernando-Garcia, J, Calle, F
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Volume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/2/025003
Date:
February, 2015
File:
PDF, 1.49 MB
english, 2015
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