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Fabrication of a high-aspect-ratio stainless steel shadow mask and its application to pentacene thin-film transistors
Yi, Sang Min, Jin, Sung Hun, Lee, Jong Duk, Chu, Chong NamVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/2/003
Date:
February, 2005
File:
PDF, 2.10 MB
english, 2005