New Method to Increase Solid Precursor Vaporization for...

Japanese Journal of Applied Physics 1998 / 2 Vol. 37; Iss. Part 1, No

New Method to Increase Solid Precursor Vaporization for Metalorganic Chemical Vapor Deposition

Tasaki, Yuzo, Yoshizawa, Shuji, Satoh, Mamoru
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Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.649
Date:
February, 1998
File:
PDF, 552 KB
1998
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