Maskless Selective Epitaxial Growth on Patterned GaAs...

Japanese Journal of Applied Physics 1998 / 4 Vol. 37; Iss. Part 1, No

Maskless Selective Epitaxial Growth on Patterned GaAs Substrates by Metalorganic Chemical Vapor Deposition

Son, Chang-Sik, Park, Young K., Kim, Seong-Il, Kim, Yong, Kim, Eun Kyu, Min, Suk-Ki, Choi, In-Hoon
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Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.37.1701
Date:
April, 1998
File:
PDF, 969 KB
1998
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