Sheath analysis in collisional electronegative plasmas with finite temperature of positive ions
Fernández Palop, J I, Ballesteros, J, Morales Crespo, R, Hernández, M AVolume:
41
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/41/23/235201
Date:
December, 2008
File:
PDF, 153 KB
english, 2008