Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2013 Vol. 31; Iss. 6
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Influence of electromigration on the maximum operating field of (Ba,Sr)TiO3/parylene-C composite capacitors
Yang, Shyuan, Kymissis, Ioannis, Leland, Eli S., Liu, Shuangyi, O'Brien, StephenVolume:
31
Year:
2013
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.4828365
File:
PDF, 1.87 MB
english, 2013