Study on Crystallinity of Tin-Doped Indium Oxide Films...

Japanese Journal of Applied Physics 1998 / 4 Vol. 37; Iss. Part 1, No

Study on Crystallinity of Tin-Doped Indium Oxide Films Deposited by DC Magnetron Sputtering

Song, Pung Keun, Shigesato, Yuzo, Yasui, Itaru, Ow-Yang, Cleva W., Paine, David C.
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Volume:
37
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.37.1870
Date:
April, 1998
File:
PDF, 1.21 MB
1998
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