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Plasma fluorination of diamond-like carbon surfaces: mechanism and application to nanoimprint lithography
Schvartzman, M, Wind, S JVolume:
20
Language:
english
Journal:
Nanotechnology
DOI:
10.1088/0957-4484/20/14/145306
Date:
April, 2009
File:
PDF, 1.12 MB
english, 2009