Evaluation of Thin-Film Residual Stress Using...

International Journal of Modern Physics B 2003 / 04 Vol. 17; Iss. 8n9

Evaluation of Thin-Film Residual Stress Using Nano-Indentation Combined with an Atomic Force Microscope

Lee, Yun Hee, Kwon, Dongil, Jang, Jae Il
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Volume:
17
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979203018648
Date:
April, 2003
File:
PDF, 307 KB
english, 2003
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