EXPERIMENTAL STUDY OF SPATIAL NON-UNIFORMITIES IN A DUAL...

Modern Physics Letters B 2009 / 11 Vol. 23; Iss. 28

EXPERIMENTAL STUDY OF SPATIAL NON-UNIFORMITIES IN A DUAL FREQUENCY CAPACITIVELY COUPLED PLASMA

ZHAO, GUOLI, XU, YONG, SHANG, JIANPING, ZHU, AIMIN, LU, WENQI, WANG, YOUNIAN
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Volume:
23
Language:
english
Journal:
Modern Physics Letters B
DOI:
10.1142/S0217984909021442
Date:
November, 2009
File:
PDF, 397 KB
english, 2009
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