Porous inorganic–organic hybrid material by oxygen plasma...

Journal of Micromechanics and Microengineering 2011 / 12 Vol. 21; Iss. 12

Porous inorganic–organic hybrid material by oxygen plasma treatment

Aura, Susanna, Jokinen, Ville, Laitinen, Mikko, Sajavaara, Timo, Franssila, Sami
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Volume:
21
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/21/12/125003
Date:
December, 2011
File:
PDF, 1.16 MB
english, 2011
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