DRY ETCHING OF SnO 2 AND ZnO...

International Journal of Modern Physics B 2011 / 12 Vol. 25; Iss. 31

DRY ETCHING OF SnO 2 AND ZnO FILMS IN HALOGEN-BASED INDUCTIVELY COUPLED PLASMAS

PARK, JONG CHEON, KIM, JIN KON, KIM, TAE GYU, LEE, DEUG WOO, CHO, HYUN, KIM, HYE SUNG, YOON, SU JONG, JUNG, YEON-GIL
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Volume:
25
Language:
english
Journal:
International Journal of Modern Physics B
DOI:
10.1142/S0217979211066660
Date:
December, 2011
File:
PDF, 355 KB
english, 2011
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