Effects of thermal annealing on the electrical...

Semiconductor Science and Technology 2015 / 01 Vol. 30; Iss. 1

Effects of thermal annealing on the electrical characteristics of In-Ga-Zn-O thin-film transistors with Al 2 O 3 gate dielectric

Zhang, Wen-Peng, Chen, Sun, Qian, Shi-Bing, Ding, Shi-Jin
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Volume:
30
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/30/1/015003
Date:
January, 2015
File:
PDF, 1.58 MB
english, 2015
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